A workstation that permits real-time measurement of ablation depth while micromachining with femtosecond laser pulses is demonstrated. This method incorporates the unamplified pulse train that is available in a chirped-pulse amplification system as the probe in an arrangement that uses spectral interferometry to measure the ablation depth while cutting with the amplified pulse in thin metal films.
© 2005 Optical Society of America
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(140.3440) Lasers and laser optics : Laser-induced breakdown
(170.7160) Medical optics and biotechnology : Ultrafast technology
(180.3170) Microscopy : Interference microscopy
(350.3390) Other areas of optics : Laser materials processing
Sudipta Bera, A. J. Sabbah, Charles G. Durfee, and Jeff A. Squier, "Development of a femtosecond micromachining workstation by use of spectral interferometry," Opt. Lett. 30, 373-375 (2005)