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Optics Letters

Optics Letters


  • Vol. 30, Iss. 4 — Feb. 15, 2005
  • pp: 373–375

Development of a femtosecond micromachining workstation by use of spectral interferometry

Sudipta Bera, A. J. Sabbah, Charles G. Durfee, and Jeff A. Squier  »View Author Affiliations

Optics Letters, Vol. 30, Issue 4, pp. 373-375 (2005)

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A workstation that permits real-time measurement of ablation depth while micromachining with femtosecond laser pulses is demonstrated. This method incorporates the unamplified pulse train that is available in a chirped-pulse amplification system as the probe in an arrangement that uses spectral interferometry to measure the ablation depth while cutting with the amplified pulse in thin metal films.

© 2005 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(140.3440) Lasers and laser optics : Laser-induced breakdown
(170.7160) Medical optics and biotechnology : Ultrafast technology
(180.3170) Microscopy : Interference microscopy
(350.3390) Other areas of optics : Laser materials processing

Sudipta Bera, A. J. Sabbah, Charles G. Durfee, and Jeff A. Squier, "Development of a femtosecond micromachining workstation by use of spectral interferometry," Opt. Lett. 30, 373-375 (2005)

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