Silicon microlens structures fabricated by scanning-probe gray-scale oxidation
Optics Letters, Vol. 30, Issue 6, pp. 652-654 (2005)
http://dx.doi.org/10.1364/OL.30.000652
Acrobat PDF (297 KB)
Abstract
We report on the micromachining of silicon microlens structures by use of scanning-probe gray-scale anodic oxidation along with dry anisotropic etching. Convex, concave, and arbitrarily shaped silicon microlenses with diameters as small as 2µm are demonstrated. We also confirm the high fidelity of pattern transfer between the probe-induced oxides and the etched silicon microlens structures. Besides the flexibility, the important features of scanning-probe gray-scale anodic oxidation are small pixel size and pitch (of the order of tens of nanometers), an unlimited number of gray-scale levels, and the possibility of creating arbitrarily designed microlens structures with exquisite precision and resolution. With this approach, refractive, diffractive, and hybrid microlens arrays can be developed to create innovative optical components.
© 2005 Optical Society of America
OCIS Codes
(220.3630) Optical design and fabrication : Lenses
(220.3740) Optical design and fabrication : Lithography
(230.4000) Optical devices : Microstructure fabrication
(350.3950) Other areas of optics : Micro-optics
Citation
C.-F. Chen, S.-D. Tzeng, H.-Y. Chen, and S. Gwo, "Silicon microlens structures fabricated by scanning-probe gray-scale oxidation," Opt. Lett. 30, 652-654 (2005)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-30-6-652
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Diffractive lens fabricated with binary features less than 60 nm (OL)
- Laser-fabricated glass microlens arrays (OL)
- Modulation Transfer Function Measurements of Microjetted Microlenses (AO)
- Microlens Formation by Thin-Film Deposition with Mesh-Shaped Masks (AO)
- Chalcogenide-glass microlenses attached to optical-fiber end surfaces (OL)
Related Conference Papers
- Lithographically Fabricated Micro-Optical Array Beam Shapers for Ultra-Short Pulse Lasers
- Fabrication of Silicon 3D Photonic Crystal Structures in 100nm Scale Using Double Directional Etchings Method
- Lithographically Fabricated Micro-Optical Array Beam Shapers for Ultra-Short Pulse Lasers
- Fabrication of Silicon 3D Photonic Crystal Structures in 100nm Scale Using Double Directional Etchings Method
- S-FIL Patterning of Photonics Substrates with Photonic Crystal Structures
« Previous Article | Next Article »
OSA is a member of 