We demonstrate the use of free-standing thin films of a complex oxide for chip-scale optical filtering. The films are used as low-order etalons with very large free spectral ranges that exceed 6.78 THz (>50 nm at 1550 nm) and use a small chip area (<500 µm2) when they are integrated. The films are produced by crystal ion slicing; this process exfoliates a micrometers-thin layer of single-crystal optical material from a bulk parent by means of high-energy-ion implantation. The etalons, which are 10 µm thick with Ag deposited on both surfaces, are integrated into a silica-on-silicon waveguide block.
© 2005 Optical Society of America
(120.2440) Instrumentation, measurement, and metrology : Filters
(130.1750) Integrated optics : Components
(130.3730) Integrated optics : Lithium niobate
(310.1860) Thin films : Deposition and fabrication
R. M. Roth, T. Izuhara, R. L. Espinola, D. Djukic, R. M. Osgood, Jr., S. Bakhru, and H. Bakhru, "Integrable wide-free-spectral-range Fabry-Perot optical filters using free-standing LiNbO3 thin films," Opt. Lett. 30, 994-996 (2005)