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Optics Letters

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  • Editor: Anthony J. Campillo
  • Vol. 31, Iss. 11 — Jun. 1, 2006
  • pp: 1648–1650

Design of two-dimensional zero reference codes with a genetic algorithm

José Sáez-Landete, Sancho Salcedo-Sanz, Manuel Rosa Zurera, José Alonso, and Eusebio Bernabeu  »View Author Affiliations


Optics Letters, Vol. 31, Issue 11, pp. 1648-1650 (2006)
http://dx.doi.org/10.1364/OL.31.001648


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Abstract

In mask-alignment systems a reference signal is needed to align the mask with the silicon wafers. The optical reference signal is the autocorrelation of two two-dimensional (2D) codes with binary transmittance. For a long time, one-dimensional codes have been used in grating-measurement systems to obtain a reference signal. The design of this type of code has needed a great computational effort, which limits the size of the code to about 100 elements. Recently, we have applied genetic algorithms to design codes with arbitrary length. We propose the application of these algorithms to design 2D codes to generate 2D optical signals used in mask-alignment systems.

© 2006 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3940) Instrumentation, measurement, and metrology : Metrology
(220.0220) Optical design and fabrication : Optical design and fabrication
(230.0230) Optical devices : Optical devices

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: December 2, 2005
Manuscript Accepted: March 5, 2006

Citation
José Sáez-Landete, Sancho Salcedo-Sanz, Manuel Rosa Zurera, José Alonso, and Eusebio Bernabeu, "Design of two-dimensional zero reference codes with a genetic algorithm," Opt. Lett. 31, 1648-1650 (2006)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-31-11-1648


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References

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