Scalable multichannel micromachining with pseudo-nondiffracting vacuum ultraviolet beam arrays generated by thin-film axicons
Optics Letters, Vol. 31, Issue 11, pp. 1666-1668 (2006)
http://dx.doi.org/10.1364/OL.31.001666
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Abstract
Scalable multichannel microstructuring was demonstrated by multiplexing a focused molecular fluorine laser beam with cylindrical nanolayer microaxicons into an array of converging pseudo-nondiffracting sub beams. The axicons were fabricated by shadow-mask vapor deposition of magnesium fluoride onto substrates of identical material. Long-period surface gratings of variable pitch were generated on poly(methyl methacrylate) by varying the target position within the converging periodic focal lines.
© 2006 Optical Society of America
OCIS Codes
(140.2180) Lasers and laser optics : Excimer lasers
(140.3300) Lasers and laser optics : Laser beam shaping
(140.3390) Lasers and laser optics : Laser materials processing
(260.7200) Physical optics : Ultraviolet, extreme
(310.0310) Thin films : Thin films
(350.3950) Other areas of optics : Micro-optics
ToC Category:
Lasers and Laser Optics
History
Original Manuscript: January 27, 2006
Manuscript Accepted: February 23, 2006
Citation
Ruediger Grunwald, Uwe Neumann, Arkadi Rosenfeld, Jianzhao Li, and Peter R. Herman, "Scalable multichannel micromachining with pseudo-nondiffracting vacuum ultraviolet beam arrays generated by thin-film axicons," Opt. Lett. 31, 1666-1668 (2006)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-31-11-1666
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