Holographic femtosecond laser processing with multiplexed phase Fresnel lenses
Optics Letters, Vol. 31, Issue 11, pp. 1705-1707 (2006)
http://dx.doi.org/10.1364/OL.31.001705
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Abstract
Holographic femtosecond laser processing with multiplexed phase Fresnel lenses for high-speed parallel fabrication of microstructures is proposed. Use of a spatial light modulator (SLM) allows independent tunability of the diffraction peaks, three-dimensional parallelism, and arbitrary, variable features. The diffraction peaks are made uniform by changing the center phase and size of each phase Fresnel lens while taking account of the intensity distribution of the irradiated laser pulse and the spatial frequency response of the SLM.
© 2006 Optical Society of America
OCIS Codes
(090.1760) Holography : Computer holography
(090.2890) Holography : Holographic optical elements
(140.7090) Lasers and laser optics : Ultrafast lasers
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.6120) Optical devices : Spatial light modulators
ToC Category:
Optical Design and Fabrication
History
Original Manuscript: February 14, 2006
Manuscript Accepted: March 1, 2006
Citation
Satoshi Hasegawa, Yoshio Hayasaki, and Nobuo Nishida, "Holographic femtosecond laser processing with multiplexed phase Fresnel lenses," Opt. Lett. 31, 1705-1707 (2006)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-31-11-1705
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