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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Anthony J. Campillo
  • Vol. 31, Iss. 12 — Jun. 15, 2006
  • pp: 1893–1895

Ultraviolet wave plates based on monolithic integration of two fully filled and planarized nanograting layers

Jian Jim Wang, Xuegong Deng, Xiaoming Liu, Anguel Nikolov, Paul Sciortino, Feng Liu, and Lei Chen  »View Author Affiliations


Optics Letters, Vol. 31, Issue 12, pp. 1893-1895 (2006)
http://dx.doi.org/10.1364/OL.31.001893


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Abstract

We successfully fabricated a high-performance half-wave plate for the 405 nm wavelength based on monolithic integration of two nanograting layers. Each of the nanograting layers functions as a quarter-wave plate. Both of the nanograting layers were fully filled and planarized to achieve the monolithic integration. UV-nanoimprint lithography, along with thin-film deposition, high-aspect-ratio reactive ion etching, and trench-filling technologies, was used in fabrication and integration of the individual nanograting layers. High-aspect-ratio nanogratings with sub- 50 nm linewidths and 100 nm spacing were fabricated to achieve good optical performance at the near-UV wavelength. The ability to integrate multiple nanostructure-based optical layers opens a path for integrated multifunction devices, as well as a new strategy for driving both miniaturization and cost.

© 2006 Optical Society of America

OCIS Codes
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.3990) Optical devices : Micro-optical devices
(230.5440) Optical devices : Polarization-selective devices

ToC Category:
Optical Devices

History
Original Manuscript: February 1, 2006
Revised Manuscript: April 1, 2006
Manuscript Accepted: April 3, 2006

Citation
Jian Jim Wang, Xuegong Deng, Xiaoming Liu, Anguel Nikolov, Paul Sciortino, Feng Liu, and Lei Chen, "Ultraviolet wave plates based on monolithic integration of two fully filled and planarized nanograting layers," Opt. Lett. 31, 1893-1895 (2006)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-31-12-1893

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