Abstract
A resonant absorption cavity that couples long-wavelength infrared (LWIR) light into a movable plate has been demonstrated for thermal detectors, especially microbolometers. Each device is continuously tunable over by using electrostatic actuation with voltages from 0 to . The width of the resonance is relatively broad, approximately , to match the large widths of many spectral features in the LWIR. At an actuation voltage of , the device switches into a broadband mode with an absorption width of . This latter mode is used to enhance sensitivity in low-light situations in which little spectral information is present.
© 2006 Optical Society of America
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