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Optics Letters

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  • Editor: Anthony J. Campillo
  • Vol. 31, Iss. 13 — Jul. 1, 2006
  • pp: 1976–1978

Frequency-comb-based interferometer for profilometry and tomography

Samuel Choi, Mitsufumi Yamamoto, Daisuke Moteki, Tatsutoshi Shioda, Yosuke Tanaka, and Takashi Kurokawa  »View Author Affiliations


Optics Letters, Vol. 31, Issue 13, pp. 1976-1978 (2006)
http://dx.doi.org/10.1364/OL.31.001976


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Abstract

A novel interferometry technique using a frequency-comb light source is proposed for surface profilometry and tomography of discontinuous objects. Surface profile measurement is performed by sweeping the comb interval frequency without mechanical scanning. Step heights of 0.5 and 1.0 mm are successfully measured by use of the scheme with 9 μ m accuracy.

© 2006 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(170.4500) Medical optics and biotechnology : Optical coherence tomography
(170.6960) Medical optics and biotechnology : Tomography

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: January 4, 2006
Revised Manuscript: April 6, 2006
Manuscript Accepted: April 8, 2006

Virtual Issues
Vol. 1, Iss. 8 Virtual Journal for Biomedical Optics

Citation
Samuel Choi, Mitsufumi Yamamoto, Daisuke Moteki, Tatsutoshi Shioda, Yosuke Tanaka, and Takashi Kurokawa, "Frequency-comb-based interferometer for profilometry and tomography," Opt. Lett. 31, 1976-1978 (2006)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-31-13-1976


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References

  1. B. Lee and T. Strand, Appl. Opt. 29, 3784 (1990). [CrossRef] [PubMed]
  2. T. Dresel, G. Hausler, and H. Venzke, Appl. Opt. 31, 919 (1992). [CrossRef] [PubMed]
  3. L. Deck and P. de Groot, Appl. Opt. 33, 7334 (1994). [CrossRef] [PubMed]
  4. M. Kinoshita, M. Takeda, H. Yago, Y. Watanabe, and T. Kurokawa, Appl. Opt. 38, 7063 (1999). [CrossRef]
  5. Z. He and K. Hotate, Opt. Lett. 24, 1502 (1999). [CrossRef]
  6. M. Yamamoto, Y. Tanaka, T. Shioda, T. Kurokawa, and K. Higuma, in Proceedings of Integrated Photonics Research and Applications (Optical Society of America, 2005), paper ITuF5.
  7. M. Martinelli, Opt. Commun. 72, 341 (1989). [CrossRef]
  8. D. Moteki, S. Choi, T. Shioda, Y. Tanaka, and T. Kurokawa, in Proceedings of Micro Optics Conference (Japan Society of Applied Physics, 2005).
  9. S. J. Lee, B. Widiyatmoko, M. Kourogi, and M. Ohtsu, Jpn. J. Appl. Phys., Part 2 40, L878 (2001). [CrossRef]

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