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Optics Letters

Optics Letters


  • Editor: Anthony J. Campillo
  • Vol. 31, Iss. 24 — Dec. 15, 2006
  • pp: 3603–3605

Near common-path optical fiber interferometer for potentially fast on-line microscale–nanoscale surface measurement

Xiangqian Jiang, Kaiwei Wang, and Haydn Martin  »View Author Affiliations

Optics Letters, Vol. 31, Issue 24, pp. 3603-3605 (2006)

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We introduce a new surface measurement method for potential online application. Compared with our previous research, the new design is a significant improvement. It also features high stability because it uses a near common-path configuration. The method should be of great benefit to advanced manufacturing, especially for quality and process control in ultraprecision manufacturing and on the production line. Proof-of-concept experiments have been successfully conducted by measuring the system repeatability and the displacements of a mirror surface.

© 2006 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: June 15, 2006
Revised Manuscript: September 20, 2006
Manuscript Accepted: September 25, 2006
Published: November 22, 2006

Xiangqian Jiang, Kaiwei Wang, and Haydn Martin, "Near common-path optical fiber interferometer for potentially fast on-line microscale-nanoscale surface measurement," Opt. Lett. 31, 3603-3605 (2006)

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