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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Anthony J. Campillo
  • Vol. 31, Iss. 24 — Dec. 15, 2006
  • pp: 3603–3605

Near common-path optical fiber interferometer for potentially fast on-line microscale–nanoscale surface measurement

Xiangqian Jiang, Kaiwei Wang, and Haydn Martin  »View Author Affiliations


Optics Letters, Vol. 31, Issue 24, pp. 3603-3605 (2006)
http://dx.doi.org/10.1364/OL.31.003603


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Abstract

We introduce a new surface measurement method for potential online application. Compared with our previous research, the new design is a significant improvement. It also features high stability because it uses a near common-path configuration. The method should be of great benefit to advanced manufacturing, especially for quality and process control in ultraprecision manufacturing and on the production line. Proof-of-concept experiments have been successfully conducted by measuring the system repeatability and the displacements of a mirror surface.

© 2006 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: June 15, 2006
Revised Manuscript: September 20, 2006
Manuscript Accepted: September 25, 2006
Published: November 22, 2006

Citation
Xiangqian Jiang, Kaiwei Wang, and Haydn Martin, "Near common-path optical fiber interferometer for potentially fast on-line microscale-nanoscale surface measurement," Opt. Lett. 31, 3603-3605 (2006)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-31-24-3603

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