OSA's Digital Library

Optics Letters

Optics Letters


  • Editor: Anthony J. Campillo
  • Vol. 31, Iss. 3 — Feb. 1, 2006
  • pp: 395–397

Low-loss one-dimensional photonic bandgap filter in (110) silicon

Ariel Lipson and Eric M. Yeatman  »View Author Affiliations

Optics Letters, Vol. 31, Issue 3, pp. 395-397 (2006)

View Full Text Article

Enhanced HTML    Acrobat PDF (258 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



A free-space silicon one-dimensional photonic bandgap optical filter is designed and fabricated. A two-stage (110) wafer etching process is employed to form the extremely vertical, smooth, and high-aspect-ratio features that are essential for good optical properties. The ⟨111⟩ oriented planes of the wafer form < 0.01 ° off-vertical trenches that make up the Fabry–Perot filter. A simulation model is presented that analyzes the effect of verticality and predicts the measured spectrum well.

© 2006 Optical Society of America

OCIS Codes
(050.2230) Diffraction and gratings : Fabry-Perot
(060.2310) Fiber optics and optical communications : Fiber optics
(060.4510) Fiber optics and optical communications : Optical communications
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(120.2440) Instrumentation, measurement, and metrology : Filters
(230.4000) Optical devices : Microstructure fabrication

ToC Category:
Diffraction and Gratings

Original Manuscript: July 13, 2005
Manuscript Accepted: October 11, 2005

Ariel Lipson and Eric M. Yeatman, "Low-loss one-dimensional photonic bandgap filter in (110) silicon," Opt. Lett. 31, 395-397 (2006)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. D. Hohlfeld, M. Epmeier, and H. Zappe, Sens. Actuators A 103, 93 (2003). [CrossRef]
  2. C. F. R. Mateus, C.-H. Chang, L. Chrostowski, S. Yang, D. Sun, R. Pathak, and C. J. Chang-Hasnain, IEEE Photon. Technol. Lett. 14, 819 (2002). [CrossRef]
  3. Y. Yi, P. Bermel, K. Wada, X. Duan, J. D. Joannopoulos, and L. C. Kimerling, Appl. Phys. Lett. 81, 4112 (2002). [CrossRef]
  4. S.-S. Yun and J.-H. Lee, J. Micromech. Microeng. 13, 721 (2003). [CrossRef]
  5. W. H. Juan and S. W. Panga, J. Vac. Sci. Technol. B 14, 4080 (1996). [CrossRef]
  6. D. Nilsson, S. Jensen, and A. Menon, J. Micromech. Microeng. 13, 57 (2003). [CrossRef]
  7. S.-S. Yun, S.-K. You, and J.-H. Lee, presented at the International Conference on Optical MEMS, Takamatsu, Japan, August 22-26, 2004.
  8. A. Lipson and E. M. Yeatman, presented at the International Conference on Optical MEMS, Oulu, Finland, August 1-4, 2005.
  9. J. A. Wahl, J. S. Van Delden, and S. Tiwari, IEEE Photon. Technol. Lett. 16, 1873 (2004). [CrossRef]
  10. H. A. Macleod, Thin Film Optical Filters, 3rd ed. (Institute of Physics Publishing, 2002), p. 642.
  11. D. L. Kendall, Annu. Rev. Mater. Sci. 9, 373 (1979). [CrossRef]
  12. Y. Uenishi, M. Tsugai, and M. Mehregany, J. Micromech. Microeng. 5, 305 (1995). [CrossRef]
  13. A. Holke and H. T. Henderson, J. Micromech. Microeng. 9, 51 (1999). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1 Fig. 2 Fig. 3
Fig. 4

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited