Mass-limited Sn target irradiated by dual laser pulses for an extreme ultraviolet lithography source
Optics Letters, Vol. 32, Issue 10, pp. 1338-1340 (2007)
http://dx.doi.org/10.1364/OL.32.001338
Enhanced HTML 
Acrobat PDF (192 KB)
Abstract
A thin Sn film was investigated as a mass-limited target for an extreme ultraviolet (EUV) lithography source. It was found that those energetic ions that are intrinsic with the mass-limited Sn target could be efficiently mitigated by introducing a low-energy prepulse. High in-band conversion efficiency from a laser to
© 2007 Optical Society of America
OCIS Codes
(300.6560) Spectroscopy : Spectroscopy, x-ray
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)
(350.4990) Other areas of optics : Particles
(350.5400) Other areas of optics : Plasmas
ToC Category:
Spectroscopy
History
Original Manuscript: December 11, 2006
Revised Manuscript: February 12, 2007
Manuscript Accepted: February 14, 2007
Published: April 17, 2007
Citation
Y. Tao, M. S. Tillack, S. S. Harilal, K. L. Sequoia, R. A. Burdt, and F. Najmabadi, "Mass-limited Sn target irradiated by dual laser pulses for an extreme ultraviolet lithography source," Opt. Lett. 32, 1338-1340 (2007)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-32-10-1338
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- X-ray brilliance measurements of a subpicosecond laser plasma using an elliptical off-axis reflection zone plate (JOSAB)
- Demonstration of transient gain x-ray lasers near 20nm for nickellike yttrium, zirconium, niobium, and molybdenum (OL)
- Polychromatic x-ray production in helium from a femtosecond high-intensity laser system (JOSAB)
- Ultrafast laser-driven x-ray spectrometer for x-ray absorption spectroscopy of transition metal complexes (OL)
- Ultrafast x-ray pulses emitted from a liquid mercury laser target (OL)
Related Conference Papers
- Characterization of a Minute Hard X-ray Source Driven by a Relativistic Wavelength-Cubed Laser
- Characterization of a Minute Hard X-ray Source Driven by a Relativistic Wavelength-Cubed Laser
- Simulation of Coupling of Ultra-Intense Laser Pulses to Funnel-Mouthed Plasma Waveguides
- Simulation of Coupling of Ultra-Intense Laser Pulses to Funnel-Mouthed Plasma Waveguides
- All optically driven femtosecond keV x-ray source
« Previous Article | Next Article »
OSA is a member of 