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Optics Letters

Optics Letters


  • Editor: Anthony J. Campillo
  • Vol. 32, Iss. 12 — Jun. 15, 2007
  • pp: 1638–1640

Angle-resolved three-dimensional analysis of surface films by coherence scanning interferometry

Peter de Groot and Xavier Colonna de Lega  »View Author Affiliations

Optics Letters, Vol. 32, Issue 12, pp. 1638-1640 (2007)

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The Fourier components of interference signals generated by scanning a high-numerical-aperture objective orthogonal to an object surface correspond to different angles of incidence on the surface. The phase and amplitude of these Fourier components relate to the structure of the object, including in particular the 3D topography and thickness profiles of thin-film layers.

© 2007 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(150.6910) Machine vision : Three-dimensional sensing
(180.3170) Microscopy : Interference microscopy
(240.0310) Optics at surfaces : Thin films

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: January 16, 2007
Revised Manuscript: April 18, 2007
Manuscript Accepted: April 20, 2007
Published: June 5, 2007

Peter de Groot and Xavier Colonna de Lega, "Angle-resolved three-dimensional analysis of surface films by coherence scanning interferometry," Opt. Lett. 32, 1638-1640 (2007)

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