Sensitive displacement detection has emerged as a significant technological challenge in mechanical resonators with nanometer-scale dimensions. A novel nanomechanical displacement detection scheme based upon the scattering of focused evanescent fields is proposed. The sensitivity of the proposed approach is studied using diffraction theory of evanescent waves. Diffraction theory results are compared with numerical simulations.
© 2007 Optical Society of America
Instrumentation, Measurement, and Metrology
Original Manuscript: January 2, 2007
Revised Manuscript: March 23, 2007
Manuscript Accepted: April 4, 2007
Published: June 21, 2007
Devrez M. Karabacak, Kamil L. Ekinci, Choon How Gan, Gregory J. Gbur, M. Selim Ünlü, Stephen B. Ippolito, Bennett B. Goldberg, and P. Scott Carney, "Diffraction of evanescent waves and nanomechanical displacement detection," Opt. Lett. 32, 1881-1883 (2007)