In situ sensitive optical monitoring with proper error compensation
Optics Letters, Vol. 32, Issue 15, pp. 2118-2120 (2007)
http://dx.doi.org/10.1364/OL.32.002118
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Abstract
We introduce a way to estimate the fluctuation of the refractive index during thin film deposition, through an optical monitor. The thicknesses and error-compensated thickness for each layer are analyzed. A novel monitoring method is thereby derived. The revised refractive index and the choice of highly sensitive monitoring wavelengths help us predict the termination points more accurately. The performance of a narrow-bandpass filter monitored by this method is demonstrated.
© 2007 Optical Society of America
OCIS Codes
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication
ToC Category:
Thin Films
History
Original Manuscript: May 29, 2007
Revised Manuscript: June 15, 2007
Manuscript Accepted: June 18, 2007
Published: July 20, 2007
Citation
Cheng-Chung Lee and Kai Wu, "In situ sensitive optical monitoring with proper error compensation," Opt. Lett. 32, 2118-2120 (2007)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-32-15-2118
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