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Optics Letters

Optics Letters


  • Editor: Anthony J. Campillo
  • Vol. 32, Iss. 15 — Aug. 1, 2007
  • pp: 2118–2120

In situ sensitive optical monitoring with proper error compensation

Cheng-Chung Lee and Kai Wu  »View Author Affiliations

Optics Letters, Vol. 32, Issue 15, pp. 2118-2120 (2007)

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We introduce a way to estimate the fluctuation of the refractive index during thin film deposition, through an optical monitor. The thicknesses and error-compensated thickness for each layer are analyzed. A novel monitoring method is thereby derived. The revised refractive index and the choice of highly sensitive monitoring wavelengths help us predict the termination points more accurately. The performance of a narrow-bandpass filter monitored by this method is demonstrated.

© 2007 Optical Society of America

OCIS Codes
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication

ToC Category:
Thin Films

Original Manuscript: May 29, 2007
Revised Manuscript: June 15, 2007
Manuscript Accepted: June 18, 2007
Published: July 20, 2007

Cheng-Chung Lee and Kai Wu, "In situ sensitive optical monitoring with proper error compensation," Opt. Lett. 32, 2118-2120 (2007)

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