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Optics Letters

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  • Editor: Anthony J. Campillo
  • Vol. 32, Iss. 18 — Sep. 15, 2007
  • pp: 2683–2685

Step-profile measurement by backpropagation of multiple-wavelength optical fields

Osami Sasaki, Hisashi Tai, and Takamasa Suzuki  »View Author Affiliations


Optics Letters, Vol. 32, Issue 18, pp. 2683-2685 (2007)
http://dx.doi.org/10.1364/OL.32.002683


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Abstract

Multiple-wavelength optical fields on a detecting plane of an interferometer are generated from the interference signals detected for an object surface. The generated optical fields are backpropagated along the optical axis. An optical field along the optical axis is reconstructed by summing the backpropagated fields over the multiple wavelengths. The intensity and phase distributions of the reconstructed optical field provide the position of the object surface with an accuracy of a few nanometers.

© 2007 Optical Society of America

OCIS Codes
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: June 13, 2007
Revised Manuscript: July 20, 2007
Manuscript Accepted: July 30, 2007
Published: September 4, 2007

Citation
Osami Sasaki, Hisashi Tai, and Takamasa Suzuki, "Step-profile measurement by backpropagation of multiple-wavelength optical fields," Opt. Lett. 32, 2683-2685 (2007)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-32-18-2683

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