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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Anthony J. Campillo
  • Vol. 32, Iss. 2 — Jan. 15, 2007
  • pp: 124–126

Evanescent imaging with induced polarization by using a solid immersion lens

Tao Chen, Tom D. Milster, Seung-Hune Yang, and Delbert Hansen  »View Author Affiliations


Optics Letters, Vol. 32, Issue 2, pp. 124-126 (2007)
http://dx.doi.org/10.1364/OL.32.000124


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Abstract

Image contrast enhancement, high lateral resolution, and height information are obtained with induced polarization evanescent imaging using a solid immersion lens. Experiments are conducted by imaging features on a patterned Si substrate. Imaging theory is used to predict optimum orientation of high-spatial-frequency samples, and a topographical image is derived from the induced polarization image through a calibration procedure. A numerical aperture of 1.5 is used in the experiment. Height accuracy of ± 2 nm is demonstrated with a known sample.

© 2006 Optical Society of America

OCIS Codes
(110.0110) Imaging systems : Imaging systems
(110.0180) Imaging systems : Microscopy
(260.5430) Physical optics : Polarization
(350.5730) Other areas of optics : Resolution

ToC Category:
Imaging Systems

History
Original Manuscript: July 19, 2006
Revised Manuscript: October 2, 2006
Manuscript Accepted: October 5, 2006
Published: December 23, 2006

Citation
Tao Chen, Tom D. Milster, Seung-Hune Yang, and Delbert Hansen, "Evanescent imaging with induced polarization by using a solid immersion lens," Opt. Lett. 32, 124-126 (2007)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-32-2-124

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