Abstract

The polarization modulation technique was successfully combined with parallel synchronous detection using a switching light source and a CCD camera to realize full-frame measurement of ellipsometric parameters. The detected thickness of a monolayer film of n-octadecylsiloxane agreed well with theoretical and reported experimental values. The thickness resolution for imaging and the temporal noise in parallel thickness measurements were smaller than $\pm 0.1\mathrm{nm}$ and smaller than $\pm 0.02\mathrm{nm}$, respectively.

© 2006 Optical Society of America

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