Coherent anti-Stokes Raman scattering microspectroscopy of silicon components with a photonic-crystal fiber frequency shifter
Optics Letters, Vol. 32, Issue 23, pp. 3471-3473 (2007)
http://dx.doi.org/10.1364/OL.32.003471
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Abstract
Coherent anti-Stokes Raman scattering (CARS) microspectroscopy of silicon components is demonstrated with pump and probe fields delivered by a mode-locked Cr:forsterite laser and the frequency-shifted soliton output of a photonic-crystal fiber as a Stokes field. CARS microspectroscopy is shown to allow a visualization of microscale features and defects on the surface of silicon wafers, offering much promise for online diagnostics of electronic and photonic silicon chip components.
© 2007 Optical Society of America
OCIS Codes
(190.4370) Nonlinear optics : Nonlinear optics, fibers
(190.5650) Nonlinear optics : Raman effect
ToC Category:
Nonlinear Optics
History
Original Manuscript: September 17, 2007
Revised Manuscript: October 29, 2007
Manuscript Accepted: October 31, 2007
Published: November 30, 2007
Citation
V. P. Mitrokhin, A. B. Fedotov, A. A. Ivanov, M. V. Alfimov, and A. M. Zheltikov, "Coherent anti-Stokes Raman scattering microspectroscopy of silicon components with a photonic-crystal fiber frequency shifter," Opt. Lett. 32, 3471-3473 (2007)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-32-23-3471
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