Coherent anti-Stokes Raman scattering (CARS) microspectroscopy of silicon components is demonstrated with pump and probe fields delivered by a mode-locked Cr:forsterite laser and the frequency-shifted soliton output of a photonic-crystal fiber as a Stokes field. CARS microspectroscopy is shown to allow a visualization of microscale features and defects on the surface of silicon wafers, offering much promise for online diagnostics of electronic and photonic silicon chip components.
© 2007 Optical Society of America
Original Manuscript: September 17, 2007
Revised Manuscript: October 29, 2007
Manuscript Accepted: October 31, 2007
Published: November 30, 2007
V. P. Mitrokhin, A. B. Fedotov, A. A. Ivanov, M. V. Alfimov, and A. M. Zheltikov, "Coherent anti-Stokes Raman scattering microspectroscopy of silicon components with a photonic-crystal fiber frequency shifter," Opt. Lett. 32, 3471-3473 (2007)