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Optics Letters

Optics Letters


  • Vol. 32, Iss. 5 — Mar. 1, 2007
  • pp: 533–535

Integrated waveguide Fabry–Perot microcavities with silicon/air Bragg mirrors

Marcel W. Pruessner, Todd H. Stievater, and William S. Rabinovich  »View Author Affiliations

Optics Letters, Vol. 32, Issue 5, pp. 533-535 (2007)

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We demonstrate in-plane microfabricated Fabry–Perot cavities with cryogenically etched silicon/air distributed Bragg reflector (DBR) mirrors and integrated silicon-on-insulator rib waveguides. Several DBR configurations and cavity lengths were measured. Various devices exhibit Q = 26963 , FWHM = 0.060 nm , finesse F = 489 , free spectral range FSR = 81.7 nm , and DBR mirror reflectance R = 99.4 % . Thermo-optic tuning over 6.7 nm is also demonstrated.

© 2007 Optical Society of America

OCIS Codes
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(230.1480) Optical devices : Bragg reflectors
(230.3120) Optical devices : Integrated optics devices
(230.5750) Optical devices : Resonators
(230.7370) Optical devices : Waveguides

ToC Category:
Optical Devices

Original Manuscript: September 7, 2006
Revised Manuscript: November 30, 2006
Manuscript Accepted: December 4, 2006
Published: February 2, 2007

Marcel W. Pruessner, Todd H. Stievater, and William S. Rabinovich, "Integrated waveguide Fabry-Perot microcavities with silicon/air Bragg mirrors," Opt. Lett. 32, 533-535 (2007)

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