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Hard-molded 51 cm long waveguide array with a 150 GHz bandwidth for board-level optical interconnects

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Abstract

We demonstrated a 51cm long waveguide array on a poly(methyl methacrylate) sheet fabricated by silicon hard-molding technology. To reduce the silicon sidewall roughness, a wet-oxidation followed by a buffered oxidation etchant etching process is adopted, achieving a surface roughness of 1.2nm. The waveguide obtained a total insertion loss of 15.1dB and an adjacent channel cross talk below 31dB. The 3dB optical bandwidth is determined to be 150GHz by the optical autocorrelation method.

© 2007 Optical Society of America

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