Ultrafast laser fabrication of submicrometer pores in borosilicate glass
Optics Letters, Vol. 33, Issue 10, pp. 1153-1155 (2008)
http://dx.doi.org/10.1364/OL.33.001153
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Abstract
We demonstrate rapid fabrication of submicrometer-diameter pores in borosilicate glass using femtosecond laser machining and subsequent wet-etch techniques. This approach allows direct and repeatable fabrication of high-quality pores with diameters of
© 2008 Optical Society of America
OCIS Codes
(190.7110) Nonlinear optics : Ultrafast nonlinear optics
(230.4000) Optical devices : Microstructure fabrication
(350.3390) Other areas of optics : Laser materials processing
ToC Category:
Nonlinear Optics
History
Original Manuscript: January 25, 2008
Revised Manuscript: April 10, 2008
Manuscript Accepted: April 13, 2008
Published: May 14, 2008
Citation
Ran An, Jeffrey D. Uram, Erik C. Yusko, Kevin Ke, Michael Mayer, and Alan J. Hunt, "Ultrafast laser fabrication of submicrometer pores in borosilicate glass," Opt. Lett. 33, 1153-1155 (2008)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-33-10-1153
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