We present a scalable method for the fabrication of site-controlled quantum dots (QDs) embedded in optical resonators. The position of the quantum dots is determined by nucleating their growth in an array of nanoholes that is aligned to a set of markers, allowing the precise overlay of the resonator geometry over the QD array. Coupling of the QDs to the resonators is demonstrated by the resonant enhancement of the spontaneous emission observed in photoluminescence experiments.
© 2008 Optical Society of America
Original Manuscript: March 26, 2008
Revised Manuscript: June 6, 2008
Manuscript Accepted: June 30, 2008
Published: July 30, 2008
Thomas Sünner, Christian Schneider, Micha Strauß, Alexander Huggenberger, Daniel Wiener, Sven Höfling, Martin Kamp, and Alfred Forchel, "Scalable fabrication of optical resonators with embedded site-controlled quantum dots," Opt. Lett. 33, 1759-1761 (2008)