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Optics Letters

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  • Editor: Alan E. Willner
  • Vol. 33, Iss. 20 — Oct. 15, 2008
  • pp: 2320–2322

Fabrication of ridge waveguides in zinc-substituted lithium niobate by means of ion-beam enhanced etching

Holger Hartung, Ernst-Berhard Kley, Andreas Tünnermann, Thomas Gischkat, Frank Schrempel, and Werner Wesch  »View Author Affiliations


Optics Letters, Vol. 33, Issue 20, pp. 2320-2322 (2008)
http://dx.doi.org/10.1364/OL.33.002320


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Abstract

We present results on the fabrication and characterization of ridge waveguides in zinc-substituted lithium niobate. High-quality waveguides were fabricated by a combination of liquid-phase epitaxy and multiple applications of ion-beam enhanced etching. The two major demands on ridge waveguides, a very low side-wall roughness and a rectangle shape with side-wall angles close to 90°, were realized simultaneously by using this technique. Single-mode waveguiding at a wavelength of 1064 nm was demonstrated with attenuation values of 0.9 dB/cm.

© 2008 Optical Society of America

OCIS Codes
(130.2790) Integrated optics : Guided waves
(130.3730) Integrated optics : Lithium niobate
(160.3730) Materials : Lithium niobate
(230.7370) Optical devices : Waveguides

ToC Category:
Integrated Optics

History
Original Manuscript: June 26, 2008
Manuscript Accepted: July 30, 2008
Published: October 10, 2008

Citation
Holger Hartung, Ernst-Berhard Kley, Andreas Tünnermann, Thomas Gischkat, Frank Schrempel, and Werner Wesch, "Fabrication of ridge waveguides in zinc-substituted lithium niobate by means of ion-beam enhanced etching," Opt. Lett. 33, 2320-2322 (2008)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-33-20-2320


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