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Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 33, Iss. 4 — Feb. 15, 2008
  • pp: 396–398

Microdeflectometry—a novel tool to acquire three-dimensional microtopography with nanometer height resolution

Gerd Häusler, Claus Richter, Karl-Heinz Leitz, and Markus C. Knauer  »View Author Affiliations


Optics Letters, Vol. 33, Issue 4, pp. 396-398 (2008)
http://dx.doi.org/10.1364/OL.33.000396


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Abstract

We introduce “microdeflectometry,” a novel technique for measuring the microtopography of specular surfaces. The primary data are the local slope of the surface under test. Measuring the slope instead of the height implies high information efficiency and extreme sensitivity to local shape irregularities. The lateral resolution can be better than 1 μ m , whereas the resulting height resolution is in the range of 1 nm . Microdeflectometry can be supplemented by methods to expand the depth of field, with the potential to provide quantitative 3D imaging with scanning-electron-microscope-like features.

© 2008 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(180.0180) Microscopy : Microscopy
(180.6900) Microscopy : Three-dimensional microscopy

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: October 24, 2007
Revised Manuscript: December 21, 2007
Manuscript Accepted: December 27, 2007
Published: February 14, 2008

Virtual Issues
Vol. 3, Iss. 3 Virtual Journal for Biomedical Optics

Citation
Gerd Häusler, Claus Richter, Karl-Heinz Leitz, and Markus C. Knauer, "Microdeflectometry—a novel tool to acquire three-dimensional microtopography with nanometer height resolution," Opt. Lett. 33, 396-398 (2008)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-33-4-396


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References

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