Microdeflectometry—a novel tool to acquire three-dimensional microtopography with nanometer height resolution
Optics Letters, Vol. 33, Issue 4, pp. 396-398 (2008)
http://dx.doi.org/10.1364/OL.33.000396
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Abstract
We introduce “microdeflectometry,” a novel technique for measuring the microtopography of specular surfaces. The primary data are the local slope of the surface under test. Measuring the slope instead of the height implies high information efficiency and extreme sensitivity to local shape irregularities. The lateral resolution can be better than
© 2008 Optical Society of America
OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(180.0180) Microscopy : Microscopy
(180.6900) Microscopy : Three-dimensional microscopy
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: October 24, 2007
Revised Manuscript: December 21, 2007
Manuscript Accepted: December 27, 2007
Published: February 14, 2008
Virtual Issues
Vol. 3, Iss. 3 Virtual Journal for Biomedical Optics
Citation
Gerd Häusler, Claus Richter, Karl-Heinz Leitz, and Markus C. Knauer, "Microdeflectometry—a novel tool to acquire three-dimensional microtopography with nanometer height resolution," Opt. Lett. 33, 396-398 (2008)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-33-4-396
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