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Optics Letters

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  • Editor: Alan E. Willner
  • Vol. 33, Iss. 5 — Mar. 1, 2008
  • pp: 491–493

Highly coherent injection-seeded 13.2 nm tabletop soft x-ray laser

F. Pedaci, Y. Wang, M. Berrill, B. Luther, E. Granados, and J. J. Rocca  »View Author Affiliations


Optics Letters, Vol. 33, Issue 5, pp. 491-493 (2008)
http://dx.doi.org/10.1364/OL.33.000491


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Abstract

We report a dramatic improvement of the spatial coherence and beam divergence ( 0.66 mrad ) of a 13.2 nm wavelength Ni-like Cd tabletop laser by injection seeding the soft x-ray laser amplifier with high-harmonics pulses generated in a Ne gas jet. This phase coherent laser is an attractive light source for at-wavelength interferometry of extreme ultraviolet lithography optics and other applications.

© 2008 Optical Society of America

OCIS Codes
(140.7240) Lasers and laser optics : UV, EUV, and X-ray lasers
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

ToC Category:
Lasers and Laser Optics

History
Original Manuscript: November 26, 2007
Manuscript Accepted: December 12, 2007
Published: February 27, 2008

Citation
F. Pedaci, Y. Wang, M. Berrill, B. Luther, E. Granados, and J. J. Rocca, "Highly coherent injection-seeded 13.2 nm tabletop soft x-ray laser," Opt. Lett. 33, 491-493 (2008)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-33-5-491


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References

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