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We have demonstrated near-wavelength resolution microscopy in the extreme ultraviolet. Images of diameter nanotubes were obtained with a single duration pulse from a desktop-size laser. We measured the modulation transfer function of the microscope for three different numerical aperture zone plate objectives, demonstrating that half-period structures can be resolved. The combination of near-wavelength spatial resolution and high temporal resolution opens myriad opportunities in imaging, such as the ability to directly investigate dynamics of nanoscale structures.
© 2008 Optical Society of America
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