Compensation of reflectance response deviations of guided-mode resonant filters induced by overetching fabrication
Optics Letters, Vol. 34, Issue 1, pp. 70-72 (2009)
http://dx.doi.org/10.1364/OL.34.000070
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Abstract
Unless the fabrication error control is well treated, it easily causes overetched fabrication errors, which causes the resonant peak value deviation during the fabrication process of guided-mode resonant filters (GMRFs). Hence, the fabrication error control becomes a key point for improving the performance of GMRF. We find that, within the range of the groove depth from
© 2008 Optical Society of America
OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(310.2790) Thin films : Guided waves
ToC Category:
Optical Design and Fabrication
History
Original Manuscript: August 26, 2008
Revised Manuscript: November 9, 2008
Manuscript Accepted: November 20, 2008
Published: December 24, 2008
Citation
Qi Wang, Dawei Zhang, Hongbo He, Yuanshen Huang, JiaBi Chen, Lin Chen, Yiming Zhu, and Songlin Zhuang, "Compensation of reflectance response deviations of guided-mode resonant filters induced by overetching fabrication," Opt. Lett. 34, 70-72 (2009)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-34-1-70
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