OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 34, Iss. 1 — Jan. 1, 2009
  • pp: 70–72

Compensation of reflectance response deviations of guided-mode resonant filters induced by overetching fabrication

Qi Wang, Dawei Zhang, Hongbo He, Yuanshen Huang, JiaBi Chen, Lin Chen, Yiming Zhu, and Songlin Zhuang  »View Author Affiliations


Optics Letters, Vol. 34, Issue 1, pp. 70-72 (2009)
http://dx.doi.org/10.1364/OL.34.000070


View Full Text Article

Enhanced HTML    Acrobat PDF (268 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Unless the fabrication error control is well treated, it easily causes overetched fabrication errors, which causes the resonant peak value deviation during the fabrication process of guided-mode resonant filters (GMRFs). Hence, the fabrication error control becomes a key point for improving the performance of GMRF. We find that, within the range of the groove depth from 93 to 105 nm , the relationship between the overetched error and the resonant peak value deviation is nearly linear, which means that we can compensate the reflectance response deviation and reduce the resonant peak value deviation by the method of covering the layer film on the GMRF. Simulation results show that the deviation is compensated perfectly by this way.

© 2008 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(310.2790) Thin films : Guided waves

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: August 26, 2008
Revised Manuscript: November 9, 2008
Manuscript Accepted: November 20, 2008
Published: December 24, 2008

Citation
Qi Wang, Dawei Zhang, Hongbo He, Yuanshen Huang, JiaBi Chen, Lin Chen, Yiming Zhu, and Songlin Zhuang, "Compensation of reflectance response deviations of guided-mode resonant filters induced by overetching fabrication," Opt. Lett. 34, 70-72 (2009)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-34-1-70


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. B. Lin, P. Li, and B. T. Cuningham, Sens. Actuators B 114, 559 (2006). [CrossRef]
  2. M. L. Wu, C. L. Hsu, H. C. Lan, H. I. Huang, Y. C. Liu, Z. R. Tu, C. C. Lee, J. S. Lin, C. C. Su, and J. Y. Chang, Opt. Lett. 32, 1614 (2007). [CrossRef] [PubMed]
  3. Y. Ding and R. Magnusson, Opt. Express 12, 5661 (2004). [CrossRef] [PubMed]
  4. J. Y. Ma, S. J. Liu, D. W. Zhang, J. K. Yao, C. Xu, J. D. Shao, Y. X. Jin, and Z. X. Fan, J. Opt. A 10, 025302 (2008). [CrossRef]
  5. R. Magnusson and S. S. Wang, Appl. Phys. Lett. 61, 1022 (1992). [CrossRef]
  6. S. S. Wang and R. Magnusson, Opt. Lett. 19, 919 (1994). [CrossRef] [PubMed]
  7. S. S. Wang and R. Magnusson, Appl. Opt. 34, 2414 (1995). [CrossRef] [PubMed]
  8. Z. S. Liu and R. Magnusson, IEEE Photon. Technol. Lett. 14, 1091 (2002). [CrossRef]
  9. Z. S. Wang, T. Sang, L. Wang, J. T. Zhu, Y. G. Wu, and L. Y. Chen, Appl. Phys. Lett. 88, 251115 (2006). [CrossRef]
  10. Z. S. Liu, S. Tibuleac, D. Shin, P. P. Young, and R. Magnusson, Opt. Lett. 23, 1556 (1998). [CrossRef]
  11. P. S. Priambodo and T. A. Maldonado, Appl. Phys. Lett. 83, 3248 (2003). [CrossRef]
  12. D. W. Dobbs, I. Gershkovich, and B. T. Cuningham, Appl. Phys. Lett. 89, 123113 (2006). [CrossRef]
  13. K. J. Lee and R. Magnusson, in Frontiers in Optics, OSA Technical Digest (CD) (Optical Society of America, 2007), paper JWC38.
  14. G. Niederer, M. Salt, H. P. Herzig, T. Overstolz, W. Noell, and N. F. de Rooij, in IEEE/Lasers and Electro-Optics Society International Conference Optical MEMS (IEEE, 2002), p. 99. [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 
Fig. 4 Fig. 5
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited