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Optics Letters

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  • Editor: Alan E. Willner
  • Vol. 34, Iss. 10 — May. 15, 2009
  • pp: 1612–1614

Microscopic TV shearography for characterization of microsystems

U. Paul Kumar, M. P. Kothiyal, and N. Krishna Mohan  »View Author Affiliations


Optics Letters, Vol. 34, Issue 10, pp. 1612-1614 (2009)
http://dx.doi.org/10.1364/OL.34.001612


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Abstract

We demonstrate a microscopic TV shearographic configuration for characterization of microsystems by measuring the slope under relatively large out-of-plane deformation. In the optical arrangement, a long working distance zoom imaging system is combined with a conventional Michelson shear interferometer. The experimental results on a microelectromechanical system pressure sensor subjected to external pressure load are presented.

© 2009 Optical Society of America

OCIS Codes
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6160) Instrumentation, measurement, and metrology : Speckle interferometry
(120.6165) Instrumentation, measurement, and metrology : Speckle interferometry, metrology

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: February 17, 2009
Revised Manuscript: April 6, 2009
Manuscript Accepted: April 6, 2009
Published: May 15, 2009

Citation
U. Paul Kumar, M. P. Kothiyal, and N. Krishna Mohan, "Microscopic TV shearography for characterization of microsystems," Opt. Lett. 34, 1612-1614 (2009)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-34-10-1612


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References

  1. Optical Inspection of Microsystems, W.Osten, ed. (CRC Press, 2007).
  2. N. Krishna Mohan and P. K. Rastogi, Opt. Lasers Eng. 47, 199 (2009). [CrossRef]
  3. L. Yang and P. Colbourne, Opt. Eng. 42, 1417 (2003). [CrossRef]
  4. U. Paul Kumar and N. Basanta Bhaduri, Opt. Lasers Eng. 46, 687 (2008). [CrossRef]
  5. U. Paul Kumar, N. Krishna Mohan, M. P. Kothiyal and A. K. Asundi, Opt. Eng. 48, 023601 (2009). [CrossRef]
  6. E. Hack, B. Frei, R. Kästle, and U. Sennhauser, Appl. Opt. 37, 2591 (1998). [CrossRef]
  7. Digital Speckle Pattern Interferometry and Related Techniques, P.K.Rastogi, ed. (Wiley, 2001).
  8. W. Steinchen and L. Yang, Digital Shearography: Theory and Application of Digital Speckle Pattern Shearing Interferometry (Optical Engineering, SPIE, 2003), Vol. PM100.
  9. J. Schmit and K. Creath, Appl. Opt. 35, 5642 (1996). [CrossRef] [PubMed]
  10. H. Aebischer and S. Waldner, Opt. Commun. 162, 205 (1999). [CrossRef]
  11. D. C. Ghiglia and M. D. Pritt, Two-Dimensional Phase Unwrapping: Theory, Algorithms and Software (Wiley, 1998).

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