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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 34, Iss. 10 — May. 15, 2009
  • pp: 1612–1614

Microscopic TV shearography for characterization of microsystems

U. Paul Kumar, M. P. Kothiyal, and N. Krishna Mohan  »View Author Affiliations

Optics Letters, Vol. 34, Issue 10, pp. 1612-1614 (2009)

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We demonstrate a microscopic TV shearographic configuration for characterization of microsystems by measuring the slope under relatively large out-of-plane deformation. In the optical arrangement, a long working distance zoom imaging system is combined with a conventional Michelson shear interferometer. The experimental results on a microelectromechanical system pressure sensor subjected to external pressure load are presented.

© 2009 Optical Society of America

OCIS Codes
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6160) Instrumentation, measurement, and metrology : Speckle interferometry
(120.6165) Instrumentation, measurement, and metrology : Speckle interferometry, metrology

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: February 17, 2009
Revised Manuscript: April 6, 2009
Manuscript Accepted: April 6, 2009
Published: May 15, 2009

U. Paul Kumar, M. P. Kothiyal, and N. Krishna Mohan, "Microscopic TV shearography for characterization of microsystems," Opt. Lett. 34, 1612-1614 (2009)

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