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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 34, Iss. 12 — Jun. 15, 2009
  • pp: 1840–1842

Effects of pupil discretization and Littrow illumination in the simulation of bright-field defect detection

Stephan Rafler, Matthias Petschow, Uwe Seifert, Karsten Frenner, Jens Göckeritz, and Wolfgang Osten  »View Author Affiliations


Optics Letters, Vol. 34, Issue 12, pp. 1840-1842 (2009)
http://dx.doi.org/10.1364/OL.34.001840


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Abstract

The simulation of optical defect detection on wafers by microscopy requires several approximations. For the simulation with Fourier modal methods, the number of modes is limited by memory and time consumption. Furthermore, the illumination pupil has to be divided into discrete incidence angles for plane waves. We present a way to save the computation of most of these incidence angles. It works only for certain configurations of grating period and illumination wavelength but is an accurate and robust approximation in these cases. We present sample calculations for one- and two-dimensional periodic structures with defects.

© 2009 Optical Society of America

OCIS Codes
(050.1960) Diffraction and gratings : Diffraction theory
(150.2950) Machine vision : Illumination
(150.1135) Machine vision : Algorithms
(050.1755) Diffraction and gratings : Computational electromagnetic methods
(150.1835) Machine vision : Defect understanding
(050.6624) Diffraction and gratings : Subwavelength structures

ToC Category:
Diffraction and Gratings

History
Original Manuscript: February 23, 2009
Revised Manuscript: April 24, 2009
Manuscript Accepted: April 24, 2009
Published: June 9, 2009

Citation
Stephan Rafler, Matthias Petschow, Uwe Seifert, Karsten Frenner, Jens Göckeritz, and Wolfgang Osten, "Effects of pupil discretization and Littrow illumination in the simulation of bright-field defect detection," Opt. Lett. 34, 1840-1842 (2009)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-34-12-1840

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