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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 34, Iss. 15 — Aug. 1, 2009
  • pp: 2378–2380

Transparent amorphous silicon channel waveguides and high-Q resonators using a damascene process

Rong Sun, Jing Cheng, Jurgen Michel, and Lionel Kimerling  »View Author Affiliations

Optics Letters, Vol. 34, Issue 15, pp. 2378-2380 (2009)

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We demonstrate a damascene process for fabricating amorphous silicon (a-Si), single-mode optical channel waveguides and high-Q racetrack resonators. This process is compatible with thermal budget limitations for a-Si phase stability. It offers improved optical transmission and facilitates hydrogen encapsulation for process integration of a-Si waveguide cores. At 1550 nm , the average measured transmission loss coefficient is 2.5 ± 0.1 dB cm for the TE mode, comparable with high-quality single crystalline silicon counterparts. The racetrack resonators have mid- 10 4 to 10 5 quality factors (Q) and extinction ratios as high as 25 dB .

© 2009 Optical Society of America

OCIS Codes
(130.2790) Integrated optics : Guided waves
(230.7380) Optical devices : Waveguides, channeled
(220.4241) Optical design and fabrication : Nanostructure fabrication
(230.4555) Optical devices : Coupled resonators

ToC Category:
Integrated Optics

Original Manuscript: June 9, 2009
Manuscript Accepted: June 29, 2009
Published: July 31, 2009

Rong Sun, Jing Cheng, Jurgen Michel, and Lionel Kimerling, "Transparent amorphous silicon channel waveguides and high-Q resonators using a damascene process," Opt. Lett. 34, 2378-2380 (2009)

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