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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 34, Iss. 21 — Nov. 1, 2009
  • pp: 3406–3408

Precise displacement measurement for a local surface

Sheng Lih Yeh, Shyh Tsong Lin, and Yu Hsin Chang  »View Author Affiliations

Optics Letters, Vol. 34, Issue 21, pp. 3406-3408 (2009)

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An optical measurement method to get the in-plane and out-of-plane displacements of a local surface using a laser is proposed. The proposed method simultaneously derives the in-plane and out-of-plane displacements by measuring the shift of interference fringes formed by scattered beams. The average errors of the in-plane and out-of-plane displacement measurements are significantly smaller than 10 nm . Moreover, the proposed method uses only low-cost optical elements.

© 2009 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4640) Instrumentation, measurement, and metrology : Optical instruments

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: August 27, 2009
Manuscript Accepted: September 30, 2009
Published: October 29, 2009

Sheng Lih Yeh, Shyh Tsong Lin, and Yu Hsin Chang, "Precise displacement measurement for a local surface," Opt. Lett. 34, 3406-3408 (2009)

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