Abstract
An optical measurement method to get the in-plane and out-of-plane displacements of a local surface using a laser is proposed. The proposed method simultaneously derives the in-plane and out-of-plane displacements by measuring the shift of interference fringes formed by scattered beams. The average errors of the in-plane and out-of-plane displacement measurements are significantly smaller than . Moreover, the proposed method uses only low-cost optical elements.
© 2009 Optical Society of America
Full Article | PDF ArticleMore Like This
Manuel H. De la Torre Ibarra, Pablo D. Ruiz, and Jonathan M. Huntley
Opt. Lett. 34(6) 806-808 (2009)
N. Krishna Mohan, H. Saldner, and N.-E. Molin
Opt. Lett. 18(21) 1861-1863 (1993)
W. Z. L. Zhuang, J. P. Baird, H. M. Williamson, and R. K. Clark
Appl. Opt. 32(25) 4728-4737 (1993)