Abstract

An optical measurement method to get the in-plane and out-of-plane displacements of a local surface using a laser is proposed. The proposed method simultaneously derives the in-plane and out-of-plane displacements by measuring the shift of interference fringes formed by scattered beams. The average errors of the in-plane and out-of-plane displacement measurements are significantly smaller than 10 nm. Moreover, the proposed method uses only low-cost optical elements.

© 2009 Optical Society of America

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History
Original Manuscript: August 27, 2009
Manuscript Accepted: September 30, 2009
Published: October 29, 2009

References

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Author Affiliations

Sheng Lih Yeh, Yu Hsin Chang

Lunghwa University of Science and Technology

Shyh Tsong Lin

National Taipei University of Technology

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