OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 34, Iss. 21 — Nov. 1, 2009
  • pp: 3406–3408

Precise displacement measurement for a local surface

Sheng Lih Yeh, Shyh Tsong Lin, and Yu Hsin Chang  »View Author Affiliations


Optics Letters, Vol. 34, Issue 21, pp. 3406-3408 (2009)
http://dx.doi.org/10.1364/OL.34.003406


View Full Text Article

Enhanced HTML    Acrobat PDF (459 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

An optical measurement method to get the in-plane and out-of-plane displacements of a local surface using a laser is proposed. The proposed method simultaneously derives the in-plane and out-of-plane displacements by measuring the shift of interference fringes formed by scattered beams. The average errors of the in-plane and out-of-plane displacement measurements are significantly smaller than 10 nm . Moreover, the proposed method uses only low-cost optical elements.

© 2009 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4640) Instrumentation, measurement, and metrology : Optical instruments

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: August 27, 2009
Manuscript Accepted: September 30, 2009
Published: October 29, 2009

Citation
Sheng Lih Yeh, Shyh Tsong Lin, and Yu Hsin Chang, "Precise displacement measurement for a local surface," Opt. Lett. 34, 3406-3408 (2009)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-34-21-3406


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. C. M. Vest (Wiley, 1979).
  2. K. J. Gasvik, Optical Metrology, 3rd ed. (Wiley, 2002). [CrossRef]
  3. Y. Y. Cheng and J. C. Wyant, Appl. Opt. 24, 804 (1985). [CrossRef] [PubMed]
  4. K. Creath, Appl. Opt. 24, 3053 (1985). [CrossRef] [PubMed]
  5. T. Kreis, Holographic Interferometry: Principles and Methods (Akademie Verlag, 1996).
  6. F. G. Cervants, G. Heinzel, A. F. G. Marin, V. Wand, F. Steier, O. Jennrich, and K. Danzmann, Appl. Opt. 46, 4541 (2007). [CrossRef]
  7. Y. Bitou, Appl. Opt. 47, 6219 (2008). [CrossRef] [PubMed]
  8. M. Francon, Laser Speckle and Applications in Optics (Academic, 1979).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited