Precise displacement measurement for a local surface
Optics Letters, Vol. 34, Issue 21, pp. 3406-3408 (2009)
http://dx.doi.org/10.1364/OL.34.003406
Enhanced HTML 
Acrobat PDF (459 KB)
Abstract
An optical measurement method to get the in-plane and out-of-plane displacements of a local surface using a laser is proposed. The proposed method simultaneously derives the in-plane and out-of-plane displacements by measuring the shift of interference fringes formed by scattered beams. The average errors of the in-plane and out-of-plane displacement measurements are significantly smaller than
© 2009 Optical Society of America
OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: August 27, 2009
Manuscript Accepted: September 30, 2009
Published: October 29, 2009
Citation
Sheng Lih Yeh, Shyh Tsong Lin, and Yu Hsin Chang, "Precise displacement measurement for a local surface," Opt. Lett. 34, 3406-3408 (2009)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-34-21-3406
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Focus Retrocollimated Interferometry for Focal-Length Measurements (AO)
- Calibration Method for Measurement of Linear Nanometric Distances by Scattered Total Internal Reflection (AO)
- White-light scanning interferometer for absolute nano-scale gap thickness measurement (OE)
- Development of Prototype Stylus Prototype for Large Optics Testing (JOSK)
- Reference surface calibration of a Fizeau interferometer through even/odd synthesis (AO)
Related Conference Papers
- Noise properties of phase-coherent supercontinua
- Ti:Sapphire Lasers for Frequency Metrology Spanning the Visible and Infrared Spectrum without Nonlinear Fiber
- Ultra-sensitive ambient trace-gas sensor using CO2 lasers and photoacoustic spectroscopy
- Agricultural ammonia sensor using diode lasers and photoacoustic spectroscopy
- The optical mouse as an inexpensive measurement device
« Previous Article | Next Article »
OSA is a member of 