OSA's Digital Library

Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 34, Iss. 24 — Dec. 15, 2009
  • pp: 3800–3802

Monolithic double-grating phase mask for large-period highly coherent grating printing

Y. Bourgin, S. Bakkali, Y. Jourlin, S. Tonchev, and O. Parriaux  »View Author Affiliations

Optics Letters, Vol. 34, Issue 24, pp. 3800-3802 (2009)

View Full Text Article

Enhanced HTML    Acrobat PDF (202 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



A monolithic double-grating phase mask comprising three short-pitch grating sections of spatial frequencies k 1 and k 2 collocated at one side of a substrate produces a large-period interferogram without higher harmonics to print in a photoresist film a latent grating of small spatial frequency equal to twice k 2 k 1 . When incorporated in a write-on-the-fly scheme, the elements permit the fabrication of unlimitedly long gratings.

© 2009 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(050.6624) Diffraction and gratings : Subwavelength structures

ToC Category:
Diffraction and Gratings

Original Manuscript: September 4, 2009
Revised Manuscript: November 3, 2009
Manuscript Accepted: November 4, 2009
Published: December 4, 2009

Y. Bourgin, S. Bakkali, Y. Jourlin, S. Tonchev, and O. Parriaux, "Monolithic double-grating phase mask for large-period highly coherent grating printing," Opt. Lett. 34, 3800-3802 (2009)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. G. D. Pitt, Eng. Sci. Educ. J. 10, 225 (2001). [CrossRef]
  2. J. Thiel and E. Spanner, in Proceedings of the EUSPEN (1999), pp. 419-422.
  3. Y. Jourlin, O. Parriaux, S. Reynaud, J. C. Pommier, M. Johnson, A. Last, and M. Guttmann, Proc. SPIE 6188, 61881B.1 (2006).
  4. E. Gamet, Y. Jourlin, S. Pelissier, R. Min, S. Reynaud, C. Veillas, J. C. Pommier, and O. Parriaux, Microelectron. Eng. 83, 734 (2006). [CrossRef]
  5. P. E. Dyer, R. J. Farley, and R. Giedl, Opt. Commun. 129, 98 (1996). [CrossRef]
  6. A. L. Charley, A. Lagrange, O. Lartigue, J. Simon, P. Thony, and P. Schiavone, J. Vac. Sci. Technol. B 23, 2668 (2005). [CrossRef]
  7. M. Flury, A. V. Tishchenko, and O. Parriaux, J. Lightwave Technol. 25, 1870 (2007). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1 Fig. 2 Fig. 3
Fig. 4

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited