Monolithic double-grating phase mask for large-period highly coherent grating printing
Optics Letters, Vol. 34, Issue 24, pp. 3800-3802 (2009)
http://dx.doi.org/10.1364/OL.34.003800
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Abstract
A monolithic double-grating phase mask comprising three short-pitch grating sections of spatial frequencies
© 2009 Optical Society of America
OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(050.6624) Diffraction and gratings : Subwavelength structures
ToC Category:
Diffraction and Gratings
History
Original Manuscript: September 4, 2009
Revised Manuscript: November 3, 2009
Manuscript Accepted: November 4, 2009
Published: December 4, 2009
Citation
Y. Bourgin, S. Bakkali, Y. Jourlin, S. Tonchev, and O. Parriaux, "Monolithic double-grating phase mask for large-period highly coherent grating printing," Opt. Lett. 34, 3800-3802 (2009)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-34-24-3800
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