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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 34, Iss. 5 — Mar. 1, 2009
  • pp: 659–661

Fabrication of low-loss silicon-on-oxidized-porous-silicon strip waveguide using focused proton-beam irradiation

E. J. Teo, A. A. Bettiol, P. Yang, M. B.H. Breese, B. Q. Xiong, G. Z. Mashanovich, W. R. Headley, and G. T. Reed  »View Author Affiliations


Optics Letters, Vol. 34, Issue 5, pp. 659-661 (2009)
http://dx.doi.org/10.1364/OL.34.000659


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Abstract

We have successfully fabricated low-loss silicon-on-oxidized-porous-silicon (SOPS) strip waveguides with high-index contrast using focused proton-beam irradiation and electrochemical etching. Smooth surface quality with rms roughness of 3.1 nm is achieved for a fluence of 1 × 10 15 cm 2 after postoxidation treatment. Optical characterization at a wavelength of 1550 nm shows a loss of 1.1 ± 0.4 dB cm and 1.2 ± 0.4 dB cm in TE and TM polarization respectively, which we believe is the lowest reported loss for SOPS waveguides. This opens up new opportunities for all-silicon-based optoelectronics applications.

© 2009 Optical Society of America

OCIS Codes
(220.4610) Optical design and fabrication : Optical fabrication
(230.7370) Optical devices : Waveguides
(290.5880) Scattering : Scattering, rough surfaces

ToC Category:
Optical Devices

History
Original Manuscript: December 10, 2008
Manuscript Accepted: December 20, 2008
Published: February 25, 2009

Citation
E. J. Teo, A. A. Bettiol, P. Yang, M. B. H. Breese, B. Q. Xiong, G. Z. Mashanovich, W. R. Headley, and G. T. Reed, "Fabrication of low-loss silicon-on-oxidized-porous-silicon strip waveguide using focused proton-beam irradiation," Opt. Lett. 34, 659-661 (2009)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-34-5-659

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