We present a single-photodetector-based hyperspectral imaging system that utilizes a microelectrical-mechanical-systems-driven diffraction grating for fast spatial scanning and two synchronized steering mirrors for slow spectral scanning. This configuration allows high-speed scanning without degradation in optical performance resulting from dynamic non-rigid-body deformation of the platform. The proposed operational principle is demonstrated with a prototype device developed using silicon microfabrication technology. The proposed spectral imaging system has the potential to achieve low cost, small form factor, and high-speed operation.
© 2009 Optical Society of America
Original Manuscript: January 6, 2009
Revised Manuscript: February 3, 2009
Manuscript Accepted: February 4, 2009
Published: March 6, 2009
Guangya Zhou, Kelvin K. L. Cheo, Yu Du, Fook Siong Chau, Hanhua Feng, and Qingxin Zhang, "Hyperspectral imaging using a microelectrical-mechanical-systems-based in-plane vibratory grating scanner with a single photodetector," Opt. Lett. 34, 764-766 (2009)