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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 34, Iss. 6 — Mar. 15, 2009
  • pp: 818–820

Broadband multilayer-coated normal incidence blazed grating with 10 % diffraction efficiency through the 13 16 nm wavelength region

Lichao Zhang, Hui Lin, Chunshui Jin, Hongjun Zhou, and Tonglin Huo  »View Author Affiliations

Optics Letters, Vol. 34, Issue 6, pp. 818-820 (2009)

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Diffraction gratings used in extreme UV are typically coated with periodic multilayer thin films. These coatings have a small bandwidth, thus leading to a narrow usable spectral region of multilayer gratings. Well-designed aperiodic multilayer coatings could provide high reflectivity over a much broader wavelength region, so they could broaden the usable spectral region of multilayer gratings. We designed and deposited an aperiodic Mo Si multilayer coating onto a blazed grating substrate. At an incidence angle of 10°, the –2nd-order diffraction efficiency of the multilayer grating is 10 % through the wavelength range of 13 16 nm .

© 2009 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(310.1620) Thin films : Interference coatings
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

ToC Category:
Diffraction and Gratings

Original Manuscript: December 23, 2008
Revised Manuscript: February 12, 2009
Manuscript Accepted: February 13, 2009
Published: March 11, 2009

Lichao Zhang, Hui Lin, Chunshui Jin, Hongjun Zhou, and Tonglin Huo, "Broadband multilayer-coated normal incidence blazed grating with ~10% diffraction efficiency through the 13-16 nm wavelength region," Opt. Lett. 34, 818-820 (2009)

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