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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 34, Iss. 6 — Mar. 15, 2009
  • pp: 845–847

Excitation of gap modes in a metal particle-surface system for sub- 30 nm plasmonic lithography

Vadakke Matham Murukeshan and Kandammathe Valiyaveedu Sreekanth  »View Author Affiliations

Optics Letters, Vol. 34, Issue 6, pp. 845-847 (2009)

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In this Letter, a near-field optical excitation of gap modes in a metal particle-surface system for patterning periodic nanostructure is proposed and numerically demonstrated using the finite-difference time-domain method. It is observed that high-density sub- 30 nm periodic structures were achievable by employing an aluminium nanosphere-silver surface system. A 2D resist profile cross section using the modified cellular automata model, which was obtained through this proposed configuration, is also presented.

© 2009 Optical Society of America

OCIS Codes
(220.3740) Optical design and fabrication : Lithography
(240.6680) Optics at surfaces : Surface plasmons
(260.3910) Physical optics : Metal optics

ToC Category:
Optics at Surfaces

Original Manuscript: September 17, 2008
Revised Manuscript: January 10, 2009
Manuscript Accepted: January 31, 2009
Published: March 13, 2009

Vadakke Matham Murukeshan and Kandammathe Valiyaveedu Sreekanth, "Excitation of gap modes in a metal particle-surface system for sub-30 nm plasmonic lithography," Opt. Lett. 34, 845-847 (2009)

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