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Optics Letters

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  • Editor: Alan E. Willner
  • Vol. 34, Iss. 8 — Apr. 15, 2009
  • pp: 1261–1263

Subsurface microscopy of integrated circuits with angular spectrum and polarization control

F. H. Köklü, S. B. Ippolito, B. B. Goldberg, and M. S. Ünlü  »View Author Affiliations


Optics Letters, Vol. 34, Issue 8, pp. 1261-1263 (2009)
http://dx.doi.org/10.1364/OL.34.001261


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Abstract

We investigate the effect of an annular pupil-plane aperture in confocal imaging while using an NA increasing lens. We show that focal spot shape is highly sensitive to both polarization and angular spectrum of the incoming light. We demonstrate a lateral spatial resolution of 145 nm ( λ 0 9 ) in the direction perpendicular to the polarization direction.

© 2009 Optical Society of America

OCIS Codes
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(180.1790) Microscopy : Confocal microscopy
(260.2110) Physical optics : Electromagnetic optics
(260.5430) Physical optics : Polarization
(110.2945) Imaging systems : Illumination design

ToC Category:
Physical Optics

History
Original Manuscript: December 24, 2008
Revised Manuscript: February 24, 2009
Manuscript Accepted: March 11, 2009
Published: April 10, 2009

Citation
F. H. Köklü, S. B. Ippolito, B. B. Goldberg, and M. S. Ünlü, "Subsurface microscopy of integrated circuits with angular spectrum and polarization control," Opt. Lett. 34, 1261-1263 (2009)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-34-8-1261


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References

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  13. S. B. Ippolito, B. B. Goldberg, and M. S. Ünlü, J. Appl. Phys. 97, 053105 (2005). [CrossRef]

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