OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 35, Iss. 1 — Jan. 1, 2010
  • pp: 19–21

Vibration-desensitized interferometer by continuous phase shifting with high-speed fringe capturing

Jungjae Park and Seung-Woo Kim  »View Author Affiliations


Optics Letters, Vol. 35, Issue 1, pp. 19-21 (2010)
http://dx.doi.org/10.1364/OL.35.000019


View Full Text Article

Enhanced HTML    Acrobat PDF (337 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Optical interferometers for surface metrology require high immunity to vibration when they are to be used outside the laboratory environment. Here we describe a continuous phase-shifting method as a means of vibration suppression, which implements phase shifting uninterruptedly while capturing resulting interference fringes at a high rate. The continuous phase shifting allows the interference initial phase under measurement to be locked to a single temporal frequency in captured fringes, thereby being recovered free from vibration by Fourier-based postprocessing. This continuous phase-shifting method can be realized with any phase-shifting interferometers by incorporating a high-speed digital camera with good intensity-to-voltage conversion linearity.

© 2009 Optical Society of America

OCIS Codes
(050.1940) Diffraction and gratings : Diffraction
(060.2430) Fiber optics and optical communications : Fibers, single-mode
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.7280) Instrumentation, measurement, and metrology : Vibration analysis
(070.2615) Fourier optics and signal processing : Frequency filtering
(150.3045) Machine vision : Industrial optical metrology

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: September 28, 2009
Manuscript Accepted: November 18, 2009
Published: December 18, 2009

Citation
Jungjae Park and Seung-Woo Kim, "Vibration-desensitized interferometer by continuous phase shifting with high-speed fringe capturing," Opt. Lett. 35, 19-21 (2010)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-35-1-19


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. O. Y. Kwon, Opt. Lett. 9, 59 (1984). [CrossRef] [PubMed]
  2. D. Malacara, Optical Shop Testing (Wiley, 1992), pp. 123-172.
  3. M. B. North-Morris, J. VanDelden, and J. C. Wyant, Appl. Opt. 41, 668 (2002). [CrossRef] [PubMed]
  4. I. Yamaguchi, J. Liu, and J.-I. Kato, Opt. Eng. 35, 2930 (1996). [CrossRef]
  5. M. Takeda, H. Ina, and S. Kobayashi, J. Opt. Soc. Am. 72, 156 (1982). [CrossRef]
  6. R. Smythe and R. Moore, Opt. Eng. 23, 361 (1984).
  7. J. E. Millerd and N. J. Brock, U.S. patent 6,304,330 (Oct. 16, 2001).
  8. J. E. Millerd, N. J. Brock, J. B. Hayes, M. B. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5531, 304 (2004). [CrossRef]
  9. M. Novak, J. Millerd, N. Brock, M. North-Morris, J. Hayes, and J. Wyant, Appl. Opt. 44, 6861 (2005). [CrossRef] [PubMed]
  10. P. de Groot, Appl. Opt. 34, 4723 (1995). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited