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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 35, Iss. 10 — May. 15, 2010
  • pp: 1602–1604

High-throughput three-dimensional lithographic microfabrication

Daekeun Kim and Peter T.C. So  »View Author Affiliations

Optics Letters, Vol. 35, Issue 10, pp. 1602-1604 (2010)

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A 3D lithographic microfabrication process has been developed that is high throughput, scalable, and capable of producing arbitrary patterns. It offers the possibility for industrial scale manufacturing of 3D microdevices such as photonic crystals, tissue engineering scaffolds, and microfluidics chips. This method is based on depth-resolved wide-field illumination by temporally focusing femtosecond light pulses. We characterized the axial resolution of this technique, and the result is consistent with the theoretical prediction. As proof-of-concept experiments, we demonstrated photobleaching of 3D resolved patterns in a fluorescent medium and fabricating 3D microstructures with SU-8 photoresist.

© 2010 Optical Society of America

OCIS Codes
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(190.4180) Nonlinear optics : Multiphoton processes
(230.4000) Optical devices : Microstructure fabrication

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: January 4, 2010
Revised Manuscript: March 23, 2010
Manuscript Accepted: March 29, 2010
Published: May 6, 2010

Virtual Issues
Vol. 5, Iss. 10 Virtual Journal for Biomedical Optics

Daekeun Kim and Peter T. C. So, "High-throughput three-dimensional lithographic microfabrication," Opt. Lett. 35, 1602-1604 (2010)

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  1. A. Hatzor and P. S. Weiss, Science 291, 1019 (2001). [PubMed]
  2. S. Kawata, H. B. Sun, T. Tanaka, and K. Takada, Nature 412, 697 (2001). [CrossRef] [PubMed]
  3. R. D. Piner, J. Zhu, F. Xu, S. H. Hong, and C. A. Mirkin, Science 283, 661 (1999). [CrossRef] [PubMed]
  4. A. A. Tseng, Small 1, 924 (2005). [CrossRef]
  5. B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, S. M. Kuebler, I. Y. S. Lee, D. McCord-Maughon, J. Q. Qin, H. Rockel, M. Rumi, X. L. Wu, S. R. Marder, and J. W. Perry, Nature 398, 51 (1999). [CrossRef]
  6. H. B. Sun, Y. Xu, S. Juodkazis, K. Sun, M. Watanabe, S. Matsuo, H. Misawa, and J. Nishii, Opt. Lett. 26, 325 (2001). [CrossRef]
  7. M. Stoneman, M. Fox, C. Y. Zeng, and V. Raicu, Lab Chip 9, 819 (2009). [CrossRef] [PubMed]
  8. B. Kaehr and J. B. Shear, Proc. Natl. Acad. Sci. USA 105, 8850 (2008). [CrossRef] [PubMed]
  9. L. P. Cunningham, M. P. Veilleux, and P. J. Campagnola, Opt. Express 14, 8613 (2006). [CrossRef] [PubMed]
  10. B. Kaehr and J. B. Shear, J. Am. Chem. Soc. 129, 1904 (2007). [CrossRef] [PubMed]
  11. J. Kato, N. Takeyasu, Y. Adachi, H. B. Sun, and S. Kawata, Appl. Phys. Lett. 86, 044102 (2005). [CrossRef]
  12. S. Jeon, V. Malyarchuk, J. A. Rogers, and G. P. Wiederrecht, Opt. Express 14, 2300 (2006). [CrossRef] [PubMed]
  13. S. Shoji and S. Kawata, Appl. Phys. Lett. 76, 2668 (2000). [CrossRef]
  14. C. N. LaFratta, L. J. Li, and J. T. Fourkas, Proc. Natl. Acad. Sci. USA 103, 8589 (2006). [CrossRef] [PubMed]
  15. D. Oron, E. Tal, and Y. Silberberg, Opt. Express 13, 1468 (2005). [CrossRef] [PubMed]
  16. G. H. Zhu, J. van Howe, M. Durst, W. Zipfel, and C. Xu, Opt. Express 13, 2153 (2005). [CrossRef] [PubMed]
  17. H. E. Pudavar, M. P. Joshi, P. N. Prasad, and B. A. Reinhardt, Appl. Phys. Lett. 74, 1338 (1999). [CrossRef]
  18. A. Diaspro, G. Chirico, C. Usai, P. Ramoino, and J. Dobrucki, in Handbook of Biological Confocal Microscopy, J.B.Pawley, ed., 3rd ed. (Springer, 2006), pp. 690–702. [CrossRef]
  19. T. J. Farrell, R. P. Hawkes, M. S. Patterson, and B. C. Wilson, Appl. Opt. 37, 7168 (1998). [CrossRef]
  20. H. B. Sun, T. Kawakami, Y. Xu, J. Y. Ye, S. Matuso, H. Misawa, M. Miwa, and R. Kaneko, Opt. Lett. 25, 1110 (2000). [CrossRef]
  21. “Processing Guidelines for SU-8 2010,” (MicroChem Corp., Newton).
  22. M. Rumi, J. E. Ehrlich, A. A. Heikal, J. W. Perry, S. Barlow, Z. Y. Hu, D. McCord-Maughon, T. C. Parker, H. Rockel, S. Thayumanavan, S. R. Marder, D. Beljonne, and J. L. Bredas, J. Am. Chem. Soc. 122, 9500 (2000). [CrossRef]
  23. W. Haske, V. W. Chen, J. M. Hales, W. T. Dong, S. Barlow, S. R. Marder, and J. W. Perry, Opt. Express 15, 3426 (2007). [CrossRef] [PubMed]

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