OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 35, Iss. 10 — May. 15, 2010
  • pp: 1695–1697

Femtosecond laser direct patterning of sensing materials toward flexible integration of micronanosensors

Li Guo, Hong Xia, Hui-Tao Fan, Yong-Lai Zhang, Qi-Dai Chen, Tong Zhang, and Hong-Bo Sun  »View Author Affiliations


Optics Letters, Vol. 35, Issue 10, pp. 1695-1697 (2010)
http://dx.doi.org/10.1364/OL.35.001695


View Full Text Article

Enhanced HTML    Acrobat PDF (438 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Reported is femtosecond laser direct patterning of sensing materials toward flexible integration of micronanosensors (FIMS), meaning the capability to fabricate multiple functional sensors of smaller size on a nonflat surface of a substrate that is not limited to silicon. As a representative example, a photosensitive Sn O 2 colloidal solution (sol) was developed, from which complex micronanostructures were written via a two-photon absorption process. After thermal decomposition of organic components, the patterned Sn O 2 microsensors responded to relative humidity (RH) with a variation range of 5 orders of magnitude. FIMS would open a new door for miniaturization of micronanosensors expected in intelligent microsystems.

© 2010 Optical Society of America

OCIS Codes
(160.6060) Materials : Solgel
(220.4241) Optical design and fabrication : Nanostructure fabrication

ToC Category:
Materials

History
Original Manuscript: January 25, 2010
Revised Manuscript: April 10, 2010
Manuscript Accepted: April 15, 2010
Published: May 14, 2010

Citation
Li Guo, Hong Xia, Hui-Tao Fan, Yong-Lai Zhang, Qi-Dai Chen, Tong Zhang, and Hong-Bo Sun, "Femtosecond laser direct patterning of sensing materials toward flexible integration of micronanosensors," Opt. Lett. 35, 1695-1697 (2010)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-35-10-1695


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. I. Simon, N. Bârsan, M. Bauer, and U. Weimar, Sens. Actuators. B 73, 1 (2001). [CrossRef]
  2. Q. Qi, T. Zhang, Q. Yu, R. Wang, Y. Zeng, L. Liu, and H. B. Yang, Sens. Actuators. B 133, 638 (2008). [CrossRef]
  3. M. Graf, D. Barrettino, S. Taschini, C. Hagleitner, A. Hierlemann, and H. Baltes, Anal. Chem. 76, 4437 (2004). [CrossRef] [PubMed]
  4. Y.-S. Lee, K.-D. Song, J.-S. Huh, W.-Y. Chung, and D.-D. Lee, Sens. Actuators. B 108, 292 (2005). [CrossRef]
  5. A. Hierlemann, O. Brand, C. Hagleitner, and H. Baltes, Proc. IEEE. 91, 839 (2003). [CrossRef]
  6. H. Xia, W.-Y. Zhang, F.-F. Wang, D. Wu, X.-W. Liu, L. Chen, Q.-D. Chen, Y.-G. Ma, and H.-B. Sun, Appl. Phys. Lett. 95, 083118 (2009). [CrossRef]
  7. D. Wu, Q.-D. Chen, L.-G. Niu, J.-N. Wang, J. Wang, R. Wang, H. Xia, and H.-B. Sun, Lab. Chip. 9, 2391 (2009). [CrossRef] [PubMed]
  8. J. Wang, H. Xia, B.-B. Xu, L.-G. Niu, D. Wu, Q.-D. Chen, and H.-B. Sun, Opt. Lett. 34, 581 (2009). [CrossRef] [PubMed]
  9. Q. Kuang, C. S. Lao, Z. L. Wang, Z. X. Xie, and L. S. Zheng, J. Am. Chem. Soc. 129, 6070 (2007). [CrossRef] [PubMed]
  10. X. Song, Q. Qi, T. Zhang, and C. Wang, Sens. Actuators. B 138, 368 (2009). [CrossRef]
  11. W. Zhang, G. Zhao, and Z. Chen, Mater. Sci. Eng. B 99, 168 (2003). [CrossRef]
  12. Y. Li, G. Zhao, W. Zhang, and Y. Chen, Surf. Interface Anal. 38, 1328 (2006). [CrossRef]
  13. S. Passinger, M. S. M. Saifullah, C. Reinhardt, K. R. V. Subramanian, B. N. Chichkov, and M. E. Welland, Adv. Mater. 19, 1218 (2007). [CrossRef]
  14. N. Tohge, K. Shinmou, and T. Minami, J. Sol-Gel Sci. Technol. 2, 581 (1994). [CrossRef]
  15. T.Seiyama, ed., Chemical Sensor Technology (Kodansha, 1989), Vol. 2, pp. 133–149.
  16. V. A. Henrich and P. A. Cox, The Surface Science of Metal Oxides (Cambridge Univ. Press, 1994).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 
Fig. 4
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited