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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 35, Iss. 10 — May. 15, 2010
  • pp: 1701–1703

Miniature surface-mountable Fabry–Perot pressure sensor constructed with a 45 ° angled fiber

H. Bae, X. M. Zhang, H. Liu, and M. Yu  »View Author Affiliations

Optics Letters, Vol. 35, Issue 10, pp. 1701-1703 (2010)

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We present a surface-mountable miniature Fabry–Perot (FP) pressure sensor that utilizes the total internal reflection at a 45 ° angled fiber end face to steer the optical axis by 90 ° . By using the fiber as a waveguide, as well as a natural mask in photolithography, an FP cavity is constructed on the sidewall of the fiber. A polymer–metal composite diaphragm is employed as the pressure transducer. The sensor exhibits a good linearity over the pressure range of 1.9 14.2 psi , with a sensitivity of 0.009 μm / psi and a hysteresis of 2.7%. This sensor is expected to impact many fronts that require reliable static pressure measurements of fluids.

© 2010 Optical Society of America

OCIS Codes
(060.2370) Fiber optics and optical communications : Fiber optics sensors
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(230.3990) Optical devices : Micro-optical devices

ToC Category:
Optical Devices

Original Manuscript: February 17, 2010
Revised Manuscript: April 17, 2010
Manuscript Accepted: April 20, 2010
Published: May 14, 2010

H. Bae, X. M. Zhang, H. Liu, and M. Yu, "Miniature surface-mountable Fabry–Perot pressure sensor constructed with a 45° angled fiber," Opt. Lett. 35, 1701-1703 (2010)

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