OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 35, Iss. 11 — Jun. 1, 2010
  • pp: 1768–1770

Vertical scanning white-light interference microscopy on curved microstructures

Peter Lehmann  »View Author Affiliations


Optics Letters, Vol. 35, Issue 11, pp. 1768-1770 (2010)
http://dx.doi.org/10.1364/OL.35.001768


View Full Text Article

Enhanced HTML    Acrobat PDF (405 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Although white-light interferometers have become well-established tools for measuring smooth, rough, and microstructured surfaces, there are some limitations in certain applications, e.g., if tilted surface areas or small radii of curvature are to be measured. Since the correction of chromatic aberrations is not perfect over the total field of view or the total pupil plane, dispersion differences occur for different ray paths of the microscopic imaging system. The influence of these effects is discussed on the basis of the most commonly used Mirau interferometer, and the resulting systematic measuring errors are explained.

© 2010 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: February 1, 2010
Revised Manuscript: April 20, 2010
Manuscript Accepted: April 27, 2010
Published: May 18, 2010

Citation
Peter Lehmann, "Vertical scanning white-light interference microscopy on curved microstructures," Opt. Lett. 35, 1768-1770 (2010)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-35-11-1768

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited