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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 35, Iss. 15 — Aug. 1, 2010
  • pp: 2615–2617

High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths

Dmitriy L. Voronov, Minseung Ahn, Erik H. Anderson, Rossana Cambie, Chih-Hao Chang, Eric M. Gullikson, Ralf K. Heilmann, Farhad Salmassi, Mark L. Schattenburg, Tony Warwick, Valeriy V. Yashchuk, Lucas Zipp, and Howard A. Padmore  »View Author Affiliations


Optics Letters, Vol. 35, Issue 15, pp. 2615-2617 (2010)
http://dx.doi.org/10.1364/OL.35.002615


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Abstract

Volume x-ray gratings consisting of a multilayer coating deposited on a blazed substrate can diffract with very high efficiency, even in high orders if diffraction conditions in-plane (grating) and out-of-plane (Bragg multilayer) are met simultaneously. This remarkable property, however, depends critically on the ability to create a structure with near atomic perfection. In this Letter we report on a method to produce these structures. We report measurements that show, for a 5000 l / mm grating diffracting in the third order, a diffraction efficiency of 37.6% at a wavelength of 13.6 nm . This work now shows a direct route to achieving high diffraction efficiency in high order at wavelengths throughout the soft x-ray energy range.

© 2010 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(230.4170) Optical devices : Multilayers
(310.1860) Thin films : Deposition and fabrication
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

ToC Category:
Diffraction and Gratings

History
Original Manuscript: May 10, 2010
Revised Manuscript: July 2, 2010
Manuscript Accepted: July 3, 2010
Published: July 29, 2010

Citation
Dmitriy L. Voronov, Minseung Ahn, Erik H. Anderson, Rossana Cambie, Chih-Hao Chang, Eric M. Gullikson, Ralf K. Heilmann, Farhad Salmassi, Mark L. Schattenburg, Tony Warwick, Valeriy V. Yashchuk, Lucas Zipp, and Howard A. Padmore, "High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths," Opt. Lett. 35, 2615-2617 (2010)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-35-15-2615

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