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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 35, Iss. 15 — Aug. 1, 2010
  • pp: 2654–2656

Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles

Y. Linzon, S. Krylov, B. Ilic, D. R. Southworth, R. A. Barton, B. R. Cipriany, J. D. Cross, J. M. Parpia, and H. G. Craighead  »View Author Affiliations

Optics Letters, Vol. 35, Issue 15, pp. 2654-2656 (2010)

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Interferometric imaging of normal mode dynamics in electromechanical resonators, oscillating in the rf regime, is demonstrated by synchronous imaging with a pulsed nanosecond laser. Profiles of mechanical modes in suspended thin film structures and their equilibrium profiles are measured through all-optical Fabry–Perot reflectance fits to the temporal traces. As a proof of principle, the mode patterns of a microdrum silicon resonator are visualized, and the extracted vibration modes and equilibrium profile show good agreement with numerical estimations.

© 2010 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(130.1750) Integrated optics : Components
(180.3170) Microscopy : Interference microscopy
(230.4685) Optical devices : Optical microelectromechanical devices
(310.6845) Thin films : Thin film devices and applications
(120.4880) Instrumentation, measurement, and metrology : Optomechanics

ToC Category:
Optical Devices

Original Manuscript: May 25, 2010
Manuscript Accepted: June 21, 2010
Published: July 30, 2010

Y. Linzon, S. Krylov, B. Ilic, D. R. Southworth, R. A. Barton, B. R. Cipriany, J. D. Cross, J. M. Parpia, and H. G. Craighead, "Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles," Opt. Lett. 35, 2654-2656 (2010)

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