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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 35, Iss. 15 — Aug. 1, 2010
  • pp: 2657–2659

Location of hot spots in integrated circuits by monitoring the substrate thermal-phase lag with the mirage effect

Xavier Perpiñà, Josep Altet, Xavier Jordà, Miquel Vellvehi, and Narcís Mestres  »View Author Affiliations

Optics Letters, Vol. 35, Issue 15, pp. 2657-2659 (2010)

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This Letter presents a solution for locating hot spots in active integrated circuits (IC) and devices. This method is based on sensing the phase lag between the power periodically dissipated by a device integrated in an IC (hot spot) and its corresponding thermal gradient into the chip substrate by monitoring the heat-induced refractive index gradient with a laser beam. The experimental results show a high accuracy and prove the suitability of this technique to locate and characterize devices behaving as hot spots in current IC technologies.

© 2010 Optical Society of America

OCIS Codes
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5710) Instrumentation, measurement, and metrology : Refraction
(120.6810) Instrumentation, measurement, and metrology : Thermal effects
(350.5340) Other areas of optics : Photothermal effects

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: May 12, 2010
Manuscript Accepted: June 21, 2010
Published: July 30, 2010

Xavier Perpiñà, Josep Altet, Xavier Jordà, Miquel Vellvehi, and Narcís Mestres, "Location of hot spots in integrated circuits by monitoring the substrate thermal-phase lag with the mirage effect," Opt. Lett. 35, 2657-2659 (2010)

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