Abstract
Using two-beam interference lithography and dry etching, we fabricated a mid-IR wire-grid polarizer consisting of a pitch WSi grating on an ceramic substrate, which has wider transparency than sapphire. The transmittance of TM polarization was greater than 70% in the wavelength range without antireflection films, and the extinction ratio was over in the wavelength range. The wire-grid polarizer with the ceramic substrate provides high durability and good IR transparency.
© 2010 Optical Society of America
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