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Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 35, Iss. 19 — Oct. 1, 2010
  • pp: 3225–3227

Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing

Yang Liao, Yongfeng Ju, Long Zhang, Fei He, Qiang Zhang, Yinglong Shen, Danping Chen, Ya Cheng, Zhizhan Xu, Koji Sugioka, and Katsumi Midorikawa  »View Author Affiliations


Optics Letters, Vol. 35, Issue 19, pp. 3225-3227 (2010)
http://dx.doi.org/10.1364/OL.35.003225


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Abstract

We demonstrate, for the first time to the best of our knowledge, fabrication of three-dimensional microfluidic channels with arbitrary lengths and configurations inside glass by femtosecond laser direct writing. The main fabrication process includes two steps: (1) direct formation of hollow microchannels in a porous glass substrate immersed in water by femtosecond laser ablation and (2) postannealing of the glass substrate at 1150 ° C by which the porous glass can be consolidated. We show that a square-wavelike channel with a total length of 1.4 cm and a diameter of 64 μm can be easily produced 250 μm beneath the glass surface.

© 2010 Optical Society of America

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(140.7090) Lasers and laser optics : Ultrafast lasers
(160.2750) Materials : Glass and other amorphous materials
(270.4180) Quantum optics : Multiphoton processes
(350.3390) Other areas of optics : Laser materials processing

ToC Category:
Lasers and Laser Optics

History
Original Manuscript: June 9, 2010
Revised Manuscript: August 13, 2010
Manuscript Accepted: August 29, 2010
Published: September 22, 2010

Citation
Yang Liao, Yongfeng Ju, Long Zhang, Fei He, Qiang Zhang, Yinglong Shen, Danping Chen, Ya Cheng, Zhizhan Xu, Koji Sugioka, and Katsumi Midorikawa, "Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing," Opt. Lett. 35, 3225-3227 (2010)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-35-19-3225


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