Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing
Optics Letters, Vol. 35, Issue 19, pp. 3225-3227 (2010)
http://dx.doi.org/10.1364/OL.35.003225
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Abstract
We demonstrate, for the first time to the best of our knowledge, fabrication of three-dimensional microfluidic channels with arbitrary lengths and configurations inside glass by femtosecond laser direct writing. The main fabrication process includes two steps: (1) direct formation of hollow microchannels in a porous glass substrate immersed in water by femtosecond laser ablation and (2) postannealing of the glass substrate at
© 2010 Optical Society of America
OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(140.7090) Lasers and laser optics : Ultrafast lasers
(160.2750) Materials : Glass and other amorphous materials
(270.4180) Quantum optics : Multiphoton processes
(350.3390) Other areas of optics : Laser materials processing
ToC Category:
Lasers and Laser Optics
History
Original Manuscript: June 9, 2010
Revised Manuscript: August 13, 2010
Manuscript Accepted: August 29, 2010
Published: September 22, 2010
Citation
Yang Liao, Yongfeng Ju, Long Zhang, Fei He, Qiang Zhang, Yinglong Shen, Danping Chen, Ya Cheng, Zhizhan Xu, Koji Sugioka, and Katsumi Midorikawa, "Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing," Opt. Lett. 35, 3225-3227 (2010)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-35-19-3225
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